References

1. P. Maroulis, J. Langan, A. Johnson, R. Ridgeway, H. Withers, "PFCs and the Semiconductor Industry: A Closer Look," Semiconductor International, November 1994.
   
   
2. "National Air Pollutant Emissions Estimates, 1900-1991," U.S. Environmental Protection Agency Publication No. EPA-454/R-92-013, October 1992.
   
   
3. M.G. Grothaus, E.R. Fanick, D. Bannon, B.B. Bykowski, M. Grimes, "Pulsed Corona Reactor for Efficient Destruction of Hazardous Gases," Southwest Research Institute Internal Research and Development Program, Project No. 10-9857.
   
   
4. 4. P. Burggraaf, "Process Exhaust Treatment," Semiconductor International, April 1993, pp. 44-47.
   
   
5. "Nonthermal Plasma Techniques for Pollution Control, Parts A & B," edited by B. Penetrante and S. Schultheis, NATO ASI Series G: Ecological Sciences, Vol. 34, Parts A and B, Springer-Verlag, Heidelberg, 1993.
   
   
6. G. Wakalopulos, "Electron Beam Array for Surface Treatment," U.S. Patent No. 5,414,267, May 9, 1995.
   
   
7. M.G. Grothaus, R.K. Hutcherson, R.A. Korzekwa, R. Brown, M.W. Ingram, R. Roush, S. Beck, M. George, R. Pearce, and R. Ridgeway, "Gaseous Effluent Treatment Using a Pulsed Corona Discharge," Proceedings, 10th Institute of Electrical and Electronics Engineers Conference on Pulsed Power, Albuquerque, New Mexico, July 10-13, 1995.
   
   
8. E.R. Fanick and B.B. Bykowski, "Simultaneous Reduction of Diesel Particulate and NOx Using a Plasma," presented at the Society of Automotive Engineers Fuels and Lubricants Meeting and Exposition, Baltimore, Maryland, October 17-20, 1994.
   
   
9. E.R. Fanick, M.G. Grothaus, B.B. Bykowski, D. Raybone, S. Hall, "Reduction of Diesel NOx/ Particulate Emissions Using a Nonthermal Plasma," Proceedings, Diesel Engine Emissions Reduction Workshop, La Jolla, California, 1995.
   

Published in the Spring 1996 issue of Technology Today®, published by Southwest Research Institute. For more information, contact Joe Fohn.