"Method and System for Modeling, Predicting, and Optimizing Chemical Mechanical Polishing Pad Wear and Extending Pad Life"
Patent No.:	6,169,931
Inventor(s):	Scott R. Runnels
Date of Issue:	1/2/2001
Assignee:	SwRI
Full Text:	US Patent & Trademark Office

Click on the inventor's name to view related technical resources:
Scott R. Runnels:	Former SwRI Employee, Mechanical Engineering

For further information, contact the Communications Department, Southwest Research Institute.

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