SwRI MEMS development capabilities: electrostatic actuators, thermal actuators, microfluidics, bio-MEMS, optical components, mechanical property testing, interaction with non-MEMS materials

Device-specific  ■  Capabilities  ■  Services  ■  System Integration

 

  image of scratch drive actuator (SDA) array
 

This scratch drive actuator (SDA) array can exert high force and move large distances. View video: Windows Media or QuickTime.

Device-Specific MEMS

Numerous MEMS-based devices have been  designed, tested, and evaluated by Southwest Research Institute (SwRI) engineers. MEMS devices use integrated circuit fabrication techniques to create extremely small devices, from 1 micron to 1 mm in length.

 

SwRI MEMS Development Capabilities

  • Electrostatic actuators

  • Thermal actuators

  • Microfluidics/Bio-MEMS

  • Optical components

  • Mechanical property testing

  • Interaction with non-MEMS materials

 

image of bidirectional horizontal thermal actuator that can be used to exert force in two directions. (U.S. Patent No. 6,607,714)

SwRI engineers developed a bidirectional horizontal thermal actuator that can be used to exert force in two directions. (U.S. Patent No. 6,607,714)

 

MEMS Services

  image of SwRI-developed stress corrosion cracking sensor.
 

SwRI engineers developed this stress corrosion cracking sensor. A test beam made of the relevant structural material can electrically detect crack growth in situ or be used as a life prediction tool. U.S. Patent #6,925,888.

  • Concept development

  • Fundamental and finite element analysis

  • Mask design layout services

  • Fabrication coordination

  • Wet-etch release

  • Wire bonding and packaging

  • System design and integration

 

MEMS System Integration

SwRI engineers can integrate your MEMS device into a finished hand-held or desktop device. We understand the complexities of handling MEMS devices in an uncontrolled environment and can design your finished product to withstand the "real world" interface.

 

SwRI engineers can add product functionality in the following areas:

  • Optics

  • Wireless communication

  • Low-noise analog electronics

  • Digital signal processing

  • Software development

  • Embedded systems

  • Mechanical design and fabrication

  • Ergonomics

  • Product packaging

  • Design transfer to manufacturing

Read more about Micro-Electro Mechanical Systems in a Winter 2004 Technology Today article.

 

For more information about micro-electro mechanical systems (MEMS) capabilities at SwRI or how you can contract with SwRI, please contact Heather Hanson at hhanson@swri.org or (210) 522-5798.

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Southwest Research Institute® (SwRI®) is an independent, nonprofit, applied engineering and physical sciences research and development organization with 12 technical divisions using multidisciplinary approaches to problem solving. The Institute occupies more than 1,200 acres and provides nearly two million square feet of laboratories, test facilities, workshops, and offices for more than 3,300 employees who perform contract work for industry and government clients.