Abstract:
A method of performing plasma immersion ion processing (PIIP), particularly suited for processing three-dimensional objects. One or more such objects are placed in a conductive cage having solid or mesh walls. The cage completely encloses the objects. A voltage is applied to the cage, and the plasma is generated, resulting in the plasma being contained within the cage.
Patent Number:
8,252,388
Date Of Issue:
08/27/2012
Inventors:
Ronghua Wei; Chris Rincon; Edward Langa
Full Text: