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Method and Apparatus for High Rate, Uniform Plasma Processing of Three-Dimensional Objects

Abstract: 

A method of performing plasma immersion ion processing (PIIP), particularly suited for processing three-dimensional objects. One or more such objects are placed in a conductive cage having solid or mesh walls. The cage completely encloses the objects. A voltage is applied to the cage, and the plasma is generated, resulting in the plasma being contained within the cage.

Patent Number: 
8,252,388
Date Of Issue: 
08/28/2012
Inventors: 

Ronghua Wei; Chris Rincon; Edward Langa