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MEMS Sensor for Detecting Stress Corrosion Cracking

Abstract: 

A sensor for measuring stress corrosion cracking and methods of using the sensor. The sensor is a MEMS device and has a cantilevered beam made from a material of interest. The sensor has on-chip electrical connections for measuring electrical characteristics that indicate cracking of the beam. The sensor may further have on-chip actuators for applying stress to the beam.

Patent Number: 
6,925,888
Date Of Issue: 
08/09/2005
Inventors: 

Christopher S. Brossia; Heather S. Hanson