Abstract
A sensor for measuring stress corrosion cracking and methods of using the sensor. The sensor is a MEMS device and has a cantilevered beam made from a material of interest. The sensor has on-chip electrical connections for measuring electrical characteristics that indicate cracking of the beam. The sensor may further have on-chip actuators for applying stress to the beam.
Patent Number
6,925,888
Date Of Issue
Inventors
Christopher S. Brossia; Heather S. Hanson