Abstract
A method of performing plasma immersion ion processing (PIIP), particularly suited for processing three-dimensional objects. One or more such objects are placed in a conductive cage having solid or mesh walls. The cage completely encloses the objects. A voltage is applied to the cage, and the plasma is generated, resulting in the plasma being contained within the cage.
Patent Number
8,252,388
Date Of Issue
Inventors
Ronghua Wei; Chris Rincon; Edward Langa