Coatings Formed from the Deposition of Plasma-Activated Adducts

A fluoro-organosiloxane composition, coating and process for depositing the coating. Substituted tetramethylenedisiloxane precursor at a flow rate (Q_srMnso) and perfluorinated propylene oxide precursor at a flow rate (Q_pFPo) are introduced into a process chamber at a flow rate ratio (Q_srMnsd Q_ppp0) in the range of0.1 to 2.0 (g/(hr·sccm)). A pulsed DC voltage is applied to a substrate and a fluoro-organosiloxane coating is deposited on the substrate, wherein the coating exhibits a water contact angle in oil (WCA/O) of greater than 155°.