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Parylene Precursors for Diamond Like Carbon Coatings

Abstract: 

The present invention provides a new class of precursors for forming an improved diamond-like carbon coating on a workpiece. The precursors of the present invention are paraxylylenes, preferably dimers of paraxylylene, which are solid at room temperature and which will vaporize, pyrolize to substantially monomeric form, condense onto a workpiece, and spontaneously polymerize to form a "parylene" film which is free of precursor droplets and absorbed water. Upon bombardment with an ion beam, the parylene film is converted into a uniform, pinhole-free DLC coating.

Patent Number: 
5,512,330
Date Of Issue: 
04/30/1996
Inventors: 

Geoffrey Dearnaly