Abstract:
The present disclosure relates to an apparatus and method utilizing double glow discharge for sputter cleaning of a selected surface. The surface may include the inner surface of a hollow substrate such as a tube which inner surface may then be coated via magnetron sputter deposition.
Patent Number:
8,747,631
Date Of Issue:
06/09/2014
Inventors:
Ronghua Wei; Edward Langa; Sabrina L. Lee
Full Text: